III · Science
Poly-SiGe for MEMS-above-CMOS Sensors
Subjects
Metal oxide semiconductors, complementary · Microelectromechanical systems · Detectors · Engineering · Systems engineering · Optical materials
Language
ENG
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![Cover of [William Wheeler Hubbell, authorized to apply for patents.] by United States. Congress. Senate. Committee on Patents](/img/cover/10200621-M.jpg)
